论文信息 - Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents - 字舞流文

Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents

Young Woong Kim | Jinho Ahn | Min-Su Kim | Hye-keun Oh | Jin-Goo Park | Young-woong Kim | M. Purushothaman | Hyun-Tae Kim | Hee-Jin Song | Hye-keun Oh | Min Su Kim | Jin-ho Ahn