Experimental phase-error extraction and modelling in silicon photonic arrayed waveguide gratings

We present a detailed study of parameter sweeps of silicon photonic arrayed waveguide gratings (AWG), looking into the effects of phase errors in the delay lines, which are induced by fabrication variation. We fabricated AWGs with 8 wavelength channels spaced 200 GHz and 400 GHz apart. We swept the waveguide width of the delay lines, and also performed a sweep where we introduced increments of length to the waveguides to emulate different AWG layouts and look into the effect of the phase errors. With this more detailed study we could quantitatively confirm the results of earlier studies, showing the wider waveguides reduce the effect of phase errors and dramatically improve the performance of the AWGs in terms of insertion loss and crosstalk. We also looked into the effect of rotating the layout of the circuit on the mask, and here we could show that, contrary to results with older technologies, this no longer has an effect on the current generation of devices.

[1]  D. Van Thourhout,et al.  Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[2]  Wim Bogaerts,et al.  Photonic Integrated Circuit Design in a Foundry+Fabless Ecosystem , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[3]  Wim Bogaerts,et al.  Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited] , 2015 .

[4]  D. Van Thourhout,et al.  Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[5]  Patrick Jaenen,et al.  Linear and Nonlinear Nanophotonic Devices Based on Silicon-on-Insulator Wire Waveguides , 2006 .

[6]  P. Verheyen,et al.  Active Components for 50 Gb/s NRZ-OOK Optical Interconnects in a Silicon Photonics Platform , 2017, Journal of Lightwave Technology.

[7]  D. Van Thourhout,et al.  Comparison of AWGs and Echelle Gratings for Wavelength Division Multiplexing on Silicon-on-Insulator , 2014, IEEE Photonics Journal.

[8]  Wim Bogaerts,et al.  Integrated design for integrated photonics: from the physical to the circuit level and back , 2013, Europe Optics + Optoelectronics.

[9]  S. Janz,et al.  Sub-wavelength grating gradient index mode transformers in high index contrast slab waveguides , 2009, OPTO.

[10]  Wim Bogaerts,et al.  Layout-Aware Variability Analysis, Yield Prediction, and Optimization in Photonic Integrated Circuits , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[11]  Gyungock Kim,et al.  Low-Crosstalk Silicon Nitride Arrayed Waveguide Grating for the 800-nm Band , 2019, IEEE Photonics Technology Letters.

[12]  C. Doerr,et al.  Planar Lightwave Devices for WDM , 2002 .

[13]  W. Bogaerts,et al.  Experimental characterization of a silicon photonic biosensor consisting of two cascaded ring resonators based on the Vernier-effect and introduction of a curve fitting method for an improved detection limit. , 2010, Optics express.

[14]  R. Baets,et al.  Extreme spectral transmission fluctuations in silicon nanowires induced by backscattering , 2016, 2016 IEEE 13th International Conference on Group IV Photonics (GFP).

[15]  Wim Bogaerts,et al.  Design trade-offs for silicon-on-insulator-based AWGs for (de)multiplexer applications. , 2013, Optics letters.

[16]  P. Dumon,et al.  Subnanometer Linewidth Uniformity in Silicon Nanophotonic Waveguide Devices Using CMOS Fabrication Technology , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[17]  W. Bogaerts,et al.  Effect of fabrication imperfections on the performance of silicon-on-insulator arrayed waveguide gratings , 2018 .

[18]  Wim Bogaerts,et al.  Accurate extraction of fabricated geometry using optical measurement , 2018, Photonics Research.

[19]  M. Smit New focusing and dispersive planar component based on an optical phased array , 1988 .

[20]  Wim Bogaerts,et al.  Hierarchical Model for Spatial Variations of Integrated Photonics , 2018, 2018 IEEE 15th International Conference on Group IV Photonics (GFP).

[21]  C. An N x N Optical Multiplexer Using a Planar Arrangement of Two Star Couplers , .

[22]  Akio Sugita,et al.  Estimation of waveguide phase error in silica-based waveguides , 1997 .

[23]  Wim Bogaerts,et al.  Parameter extraction, variability analysis and yield prediction of the photonic integrated circuits , 2019 .

[24]  W. Bogaerts,et al.  Two-Dimensional Dispersive Off-Chip Beam Scanner Fabricated on Silicon-On-Insulator , 2011, IEEE Photonics Technology Letters.

[25]  Wim Bogaerts,et al.  Effect of Mask Discretization on Performance of Silicon Arrayed Waveguide Gratings , 2014, IEEE Photonics Technology Letters.