A standing wave linear ultrasonic motor operating in face-diagonal-bending mode

We report a piezoelectric standing wave linear ultrasonic motor with double driving tips for generating precision motion. The motor's piezoelectric actuator was made of a simple Pb(Zr,Ti)O3 square-plate (15 × 15 × 2 mm3) operating in a single face-diagonal-bending standing wave mode to produce symmetric, bi-directional linear motion. The motor generated a driving force of 3.0 N and a moving speed of up to 165 mm/s under a relatively low applied electric field of 75 Vpp/mm at a resonance frequency of 141.5 kHz. This motor is superior to those previously reported because of the double friction-tip standing wave driving mechanism and the operating mode.

[1]  S. Dong,et al.  A double-mode piezoelectric single-crystal ultrasonic micro-actuator , 2010, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[2]  Robert C. Richardson,et al.  Design and evaluation of linear ultrasonic motors for a cardiac compression assist device , 2005 .

[3]  P. Laoratanakul,et al.  Design and performance testing of an ultrasonic linear motor with dual piezoelectric actuators , 2012, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[4]  Y Chen,et al.  A traveling wave ultrasonic motor of high torque. , 2006, Ultrasonics.

[5]  J. Ryu,et al.  Ferroelectric and piezoelectric properties of 0.948(K0.5Na0.5)NbO3–0.052LiSbO3 lead-free piezoelectric thick film by aerosol deposition , 2008 .

[6]  Susung Lee,et al.  Design and fabrication of a new traveling wave-type ultrasonic linear motor , 2001 .

[7]  S He,et al.  Standing wave bi-directional linearly moving ultrasonic motor. , 1998, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[8]  Shuxiang Dong,et al.  A double B1-mode 4-layer laminated piezoelectric linear motor , 2012, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

[9]  T. Hemsel,et al.  Survey of the present state of the art of piezoelectric linear motors , 2000, Ultrasonics.

[10]  Chunsheng Zhao,et al.  A vibrators alternation stepping ultrasonic motor. , 2006, Ultrasonics.

[11]  Shuxiang Dong,et al.  A square-plate ultrasonic linear motor operating in two orthogonal first bending modes , 2013, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  Kee-Joe Lim,et al.  Fabrication and characteristics of impact type ultrasonic motor , 2007 .

[13]  T. Funakubo,et al.  Ultrasonic Linear Motor Using Multilayer Piezoelectric Actuators , 1995 .

[14]  Y. Tomikawa,et al.  Same phase drive-type ultrasonic motors using two degenerate bending vibration modes of a disk , 1992, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[15]  S. Dong,et al.  A piezoelectric single-crystal ultrasonic microactuator for driving optics , 2011, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[16]  Kenji Uchino,et al.  Ultrasonic linear motors using a multilayered piezoelectric actuator , 1988 .

[17]  J. Scott,et al.  Applications of Modern Ferroelectrics , 2007, Science.

[18]  O. Vyshnevsky,et al.  A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[19]  Yongrae Roh,et al.  Development of a new standing wave type ultrasonic linear motor , 2004 .

[20]  Tieying Zhou,et al.  Study of a new type linear ultrasonic motor with double-driving feet. , 2006, Ultrasonics.

[21]  Patrice Minotti,et al.  Control of a multidegree of freedom standing wave ultrasonic motor driven precise positioning system , 1997 .

[22]  A. Kumada,et al.  A Piezoelectric Ultrasonic Motor , 1985 .

[23]  Kenji Uchino.  Piezoelectric ultrasonic motors: overview , 1998 .

[24]  Shuxiang Dong,et al.  A high-temperature double-mode piezoelectric ultrasonic linear motor , 2012 .

[25]  B. Koc,et al.  Piezoelectric micromotor using a metal-ceramic composite structure , 2000, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[26]  S. Priya,et al.  High-Tm relaxor ferroelectrics: 0.3BiScO3-0.6PbTiO3-0.1Pb(Mn1/3Nb2/3 ) O3 , 2003 .

[27]  Chunsheng Zhao,et al.  A new standing-wave-type linear ultrasonic motor based on in-plane modes. , 2011, Ultrasonics.

[28]  Chunsheng Zhao,et al.  Simple new ultrasonic piezoelectric actuator for precision linear positioning , 2012, Journal of Electroceramics.

[29]  Yasuyoshi Saito,et al.  Lead-free piezoceramics , 2004, Nature.

[30]  Woon-Ha Yoon,et al.  Fabrication and ferroelectric properties of highly dense lead-free piezoelectric (K0.5Na0.5)NbO3 thick films by aerosol deposition , 2007 .