Fabrication and non-linear load-pull characterization of GaN HEMT on SiC for high power applications

Some recent advances and promising results of GaN technology developed by AMS are presented in this work. Due to the wide band-gap properties of this material, these devices are very well suited for high power applications, and must be characterized under strongly non-linear and high power conditions. Pulsed DC characterization and load-pull measurements have been performed on HEMT devices with different layouts and processes, in order to improve and refine the fabrication methodology. AMS devices show a good technology maturity, with performances comparable with state of the art