论文信息 - Grating lenses for the semiconductor laser wavelength.

Grating lenses for the semiconductor laser wavelength.

Off-axis grating lenses and astigmatic grating lenses, designed for semiconductor laser wavelengths, have been fabricated by an electron-beam (EB) exposure system. High N.A. off-axis grating lenses with near-diffraction-limited operation were obtained. Grating lenses with a complex function, such as astigmatic lenses, are also available by EB lithography.

G. Hatakoshi | K. Goto | G Hatakoshi | K Goto

[1] C. Ortiz,et al. Calculation and experimental verification of two-dimensional focusing grating couplers , 1981 .

[2] Holocoupler: A novel coupler for optical circuits , 1975 .

[3] Karl Knop,et al. Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves , 1978 .

[4] T. Gaylord,et al. Rigorous coupled-wave analysis of planar-grating diffraction , 1981 .

[5] H. Nishihara,et al. Blazed gratings and Fresnel lenses fabricated by electron-beam lithography. , 1982, Optics letters.

[6] D. C. Shaver,et al. X-ray zone plates fabricated using electron-beam and x-ray lithography , 1979 .

[7] Thomas K. Gaylord,et al. Diffraction regimes of transmission gratings , 1978 .

[8] J R Fienup,et al. Holographic optics for a matched-filter optical processor. , 1979, Applied optics.

[9] H. Nishihara,et al. Fabrication of micro lenses using electron-beam lithography. , 1981, Optics letters.

[10] Olivério D. D. Soares. Holographic Coupler For Fiber Optics , 1981 .

[11] G Hatakoshi,et al. Waveguide grating lenses for optical couplers. , 1984, Applied optics.

[12] R. Magnusson,et al. Diffraction efficiencies of thin phase gratings with arbitrary grating shape , 1978 .