论文信息 - Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches

Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches

Modifications to a standard capacitive MEMS switch process have been made to allow the incorporation of ultra-nano-crystalline diamond as the switch dielectric. The impact on electromechanical performance is minimal. However, these devices exhibit uniquely different charging characteristics, with charging and discharging time constants 5–6 orders of magnitude quicker than conventional materials. This operation opens the possibility of devices which have no adverse effects of dielectric charging and can be operated near-continuously in the actuated state without significant degradation in reliability.

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