Beam injection assessment of defects in semiconductors : proceedings of the 5th workshop on beam injection assessment of defects in semiconductors held in Parkhotel Schloss Wulkow near Berlin, Germany, August 30-September 3, 1998

The 5th International Workshop on Beam Injection Assess ment of Defects in Semiconductors (BIADS 98) focussed on many theoretical and experimental aspects of this topic. The aim was to bring together specialists working in the fields of both fundamental research and applications. There were more than 80 participants from 15 countries all over the world. The topics covered by the BIADS 98 program included: charge-collection microscopy and related methods, luminescence, near-field methods and STM, advanced methods and applications, application of beam injection to technology and to devices and teterostructures. This book should therefore be of interest to anyone working on defects in semiconductors.