Mid-infrared silicon-on-sapphire waveguide coupled photonic crystal microcavities

We experimentally demonstrate a photonic crystal (PC) microcavity side coupled to a W1.05 photonic crystal waveguide fabricated in silicon-on-sapphire working in mid-IR regime at 3.43 μm. Using a fixed wavelength laser source, propagation characteristics of PC waveguides without microcavity are characterized as a function of lattice constant to determine the light line position, stop gap, and guided mode transmission behavior. The resonance of an L21 PC microcavity coupled to the W1.05 PCW in the guided mode transmission region is then measured by thermal tuning of the cavity resonance across the source wavelength. Resonance quality factor ∼3500 is measured from the temperature dependency curve.

[1]  Swapnajit Chakravarty,et al.  Multiplexed detection of xylene and trichloroethylene in water by photonic crystal absorption spectroscopy. , 2013, Optics letters.

[2]  Irfan Bulu,et al.  Mid-infrared photonic crystal cavities in silicon. , 2011, Optics express.

[3]  Ray T. Chen,et al.  Grating-coupled silicon-on-sapphire integrated slot waveguides operating at mid-infrared wavelengths. , 2014, Optics letters.

[4]  Sean P. Anderson,et al.  Slow Light with Photonic Crystals for On-Chip Optical Interconnects , 2008 .

[5]  D. Moss,et al.  Low propagation loss silicon-on-sapphire waveguides for the mid-infrared. , 2011, Optics express.

[6]  Ray T. Chen,et al.  The role of group index engineering in series-connected photonic crystal microcavities for high density sensor microarrays. , 2014, Applied physics letters.

[7]  H. Li.  Refractive index of silicon and germanium and its wavelength and temperature derivatives , 1980 .

[8]  E. Yablonovitch,et al.  Inhibited spontaneous emission in solid-state physics and electronics. , 1987, Physical review letters.

[9]  Ray T. Chen,et al.  Methods to array photonic crystal microcavities for high throughput high sensitivity biosensing on a silicon-chip based platform. , 2012, Lab on a chip.

[10]  R. Soref.  Mid-infrared photonics in silicon and germanium , 2010 .

[11]  Malcolm Dunn,et al.  Mid-infrared photonic crystal waveguides in silicon. , 2012, Optics express.

[12]  Masaya Notomi,et al.  Fast bistable all-optical switch and memory on a silicon photonic crystal on-chip. , 2005, Optics letters.

[13]  Ke Xu,et al.  Mid-Infrared Grating Couplers for Silicon-on-Sapphire Waveguides , 2012, IEEE Photonics Journal.

[14]  Ray T. Chen,et al.  Experimental Demonstration of Propagation Characteristics of Mid-infrared Photonic Crystal Waveguides in Silicon-on-sapphire References and Links , 2022 .

[15]  Richard A. Soref,et al.  Silicon waveguided components for the long-wave infrared regionThis article was submitted to the spe , 2006 .

[16]  Ray T. Chen,et al.  Silicon nano-membrane based photonic crystal microcavities for high sensitivity bio-sensing. , 2012, Optics letters.

[17]  John,et al.  Strong localization of photons in certain disordered dielectric superlattices. , 1987, Physical review letters.

[18]  Ray T. Chen,et al.  Large optical spectral range dispersion engineered silicon-based photonic crystal waveguide modulator. , 2012, Optics express.

[19]  Ray T. Chen,et al.  Cavity-Waveguide Coupling Engineered High Sensitivity Silicon Photonic Crystal Microcavity Biosensors With High Yield , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[20]  Ray T. Chen,et al.  Mid-infrared holey and slotted photonic crystal waveguides in silicon-on-sapphire for chemical warfare simulant detection , 2015 .

[21]  T. Baehr‐Jones,et al.  Silicon-on-sapphire integrated waveguides for the mid-infrared. , 2009, Optics express.

[22]  Ray T. Chen,et al.  Slow light engineering for high Q high sensitivity photonic crystal microcavity biosensors in silicon. , 2012, Biosensors & bioelectronics.

[23]  Ray T. Chen,et al.  Slow light enhanced sensitivity of resonance modes in photonic crystal biosensors. , 2013, Applied physics letters.