Advanced simulation framework for AMHS ISSM Paper: FD-P-067

AMHS (Automated Material Handling System) ven- dors are being expected not only to offer transport capabilities but also to guarantee its contribution to entire fab productiv- ities. One of essential techniques for realizing this is estima- tion with using simulation studies prior to installation of AMHS into a fab. However traditional framework of AMHS simulation cannot enable to estimate entire fab productivities. This paper describes a new simulation framework for estima- tion of entire fab productivities, which describes what should be modeled and how they should be modeled.