Dynamics Model of Micro-Displacement Stage Based on High-Frequency

The optical structure has a large number of micro-structures, which has multiple arrays, complex free-form surface features. But those can not be achieved the requirements with traditional turning and grinding processing, it require to use high-frequency and micro-feed to get ultra-precision machining precision. After creating the 3D digital model of micro-displacement platform using Pro/Engineer, and analyzing the motion and the force, the paper studies the influencing factors about the rigidity and acceleration and explores the motion characteristics of the micro-displacement platform in the high-frequency control, and it the establishes the corresponding dynamics equation. The stiffness and linearity data is accessed after the micro-stage is simulated used by Admas and Ansys software. According to the above data, the structure of micro-stage is optimized in order to meet the ultra-precision machining accuracy and the quality of the workpiece. The research takes advantage of the favorable conditions of the Nanofabrication Laboratory, and it has completed the physical production of the micro-displacement platform supported by the introduction of innovative R&D team program of Guangdong Province, those provide a reliable experimental conditions for future in-depth study.