Nanostructured all-silicon photodetector pixels with tailored responsivity spectra

We experimentally demonstrate nanostructured silicon photodetectors which consist of subwavelength arrays of verticallyoriented waveguides etched into a P-I-N photodiode. Our device combines both spectral-filtering and photocurrentgeneration in one all-Si structure. We show that absorption and responsivity spectra of these nanophotonic devices can be tuned by appropriate geometric design.