论文信息 - A Plasma Lens for Magnetron Sputtering

A Plasma Lens for Magnetron Sputtering

A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.

A. Anders | A. Anders | J. Brown | J. Brown

[1] Bernd Rech,et al. Transparent conductive zinc oxide : basics and applications in thin film solar cells , 2008 .

[2] U. Helmersson,et al. Guiding the deposition flux in an ionized magnetron discharge , 2006 .

[3] A. Anders. Cathodic Arcs: From Fractal Spots to Energetic Condensation , 2008 .

[4] J. Schneider,et al. Influence of the negative oxygen ions on the structure evolution of transition metal oxide thin films , 2006 .

[5] Peter M. Martin,et al. Handbook of deposition technologies for films and coatings , 2010 .

[6] S. Konstantinidis,et al. High power pulsed magnetron sputtering: A review on scientific and engineering state of the art , 2010 .

[7] V. T. Tolok,et al. Motion of plasma streams from a vacuum arc in a long, straight plasma-optics system , 1980 .

[8] A. Anders. Imaging the separation of cathodic arc plasma and macroparticles in curved magnetic filters , 2002 .