A Study on Dynamic Performance of Precise XY Stages Using Real-Time Input Shaping

Reducing residual vibration is very crucial to enhance the speed and precision of XY stages which are often employed by manufacturing/measuring machines. Input shaping is known to be a very effective tool for suppressing such residual vibration without introducing any complicated sensors and feedback control. This paper investigated the effects of input command discretization parameters in real-time input shaping, such as discretizing interval and duration time, on the dynamic performance of a XY stage equipped with servo motors. A simulation model is established to investigate the dynamic performance of the XY stage. In order to evaluate the real-time input shaping parameters on the performance of the XY stage, two fundamental input shaping schemes, ZV(zero vibration) and ZVD(zero vibration and derivative), are implemented and tested with the discretizing interval and duration time varied. The experimental results provide a strategy to gain better performance.