Infrared Micro-Particle Image Velocimetry Measurements and Predictions of Flow Distribution in a Microchannel Heat Sink *

Abstract The flow distribution in a silicon microchannel heat sink was studied using infrared micro-particle image velocimetry (IR μPIV). The microchannel test piece consisted of seventy-six 110 μm wide × 371 μm deep channels etched into a silicon substrate. Inlet and outlet manifolds, also etched into the substrate, were fed by 1.4 mm inner-diameter tubing ports. An image-processing algorithm was developed that significantly improves the quality of IR μPIV recordings in low signal-to-noise ratio environments. A general expression for the PIV measurement depth is presented, which is valid for PIV images that have undergone a threshold image-processing operation. Experiments were performed at two different flow rates: 10 ml/min (Re = 10.2) and 100 ml/min (Re = 102). Little flow maldistribution was observed at the lower flow rate. However, significant flow maldistribution was observed at Re = 102, with the channels near the centerline having an approximately 30% greater mass flux than the channels near the lateral edges of the heat sink. Numerical simulations carried out for flow in the microchannel heat sink agreed very well with the experimental measurements, validating the use of a computational approach for studying the effect of manifold design on flow distribution in microchannel heat sinks.

[1]  G. Adomian The Navier-Stokes Equations , 1989 .

[2]  Louis Rosenhead,et al.  Laminar boundary layers , 1963 .

[3]  S. Wereley,et al.  PIV measurements of a microchannel flow , 1999 .

[4]  S. Garimella,et al.  Investigation of heat transfer in rectangular microchannels , 2005 .

[5]  Steven T. Wereley,et al.  A correlation-based continuous window-shift technique to reduce the peak-locking effect in digital PIV image evaluation , 2002 .

[6]  Carl D. Meinhart,et al.  Second-order accurate particle image velocimetry , 2001 .

[7]  Laimonas Kelbauskas,et al.  Microscopes , 1881, The Hospital.

[8]  Jorge Herbert de Lira,et al.  Two-Dimensional Signal and Image Processing , 1989 .

[9]  E. Palik Handbook of Optical Constants of Solids , 1997 .

[10]  K. Breuer,et al.  INFRARED DIAGNOSTICS FOR MEASURING FLUID AND SOLID MOTION INSIDE SILICON MICRODEVICES , 2004 .

[11]  Michael Bass,et al.  Handbook of optics , 1995 .

[12]  S. Garimella,et al.  Investigation of Liquid Flow in Microchannels , 2002 .

[13]  R. Pease,et al.  High-performance heat sinking for VLSI , 1981, IEEE Electron Device Letters.

[14]  D. Beebe,et al.  A particle image velocimetry system for microfluidics , 1998 .

[15]  R. Adrian,et al.  Effect of resolution on the speed and accuracy of particle image velocimetry interrogation , 1992 .

[16]  S. Wereley,et al.  A PIV Algorithm for Estimating Time-Averaged Velocity Fields , 2000 .

[17]  S. Wereley,et al.  Volume illumination for two-dimensional particle image velocimetry , 2000 .

[18]  S. Wereley,et al.  The theory of diffraction-limited resolution in microparticle image velocimetry , 2003 .

[19]  Masaru Noda,et al.  CFD-based optimal design of manifold in plate-fin microdevices , 2004 .

[20]  Dong Liu,et al.  Infrared micro-particle image velocimetry in silicon-based microdevices , 2005 .

[21]  S. Garimella,et al.  Thermally Developing Flow and Heat Transfer in Rectangular Microchannels of Different Aspect Ratios , 2006 .

[22]  Bing-Chwen Yang,et al.  Numerical study of flow mal-distribution on the flow and heat transfer for multi-channel cold-plates , 2004, Twentieth Annual IEEE Semiconductor Thermal Measurement and Management Symposium (IEEE Cat. No.04CH37545).