Microstructure and elastic properties of atomic layer deposited TiO2 anatase thin films

Abstract Amorphous TiO 2 thin films were deposited by means of atomic layer deposition on Kapton substrates and then crystallized ex situ by annealing at 300 °C to obtain the anatase phase. The morphology, structure and microstructure of films treated for 12, 24, 72 and 90 h were investigated. The local Ti coordination changes were studied by X-ray near-edge structure (XANES). On the basis of X-ray diffraction residual stress calculations, the elastic anisotropy of the films is experimentally determined for the first time ( A comp ∗ = 0.07 , A shear ∗ = 0.03 ). The film macro-strains increased with the time of treatment, while the micro-strains decreased. This effect may be correlated with the incipient anatase-to-rutile transformation as suggested by the changes observed in the XANES pattern of the film treated for 90 h. However, the contribution of the substrate cannot be excluded.

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