Development of Microelectrodes for Integrated CMOS Chemical Sensors

Chlorination is the most commonly used method for water treatment in municipal water systems. Health issues and regulations require properly controlled amount of chlorine for chlorination. Monitoring chlorine concentration thus is very important. We report here on our progress toward the fabrication and testing of microelectrodes for chlorine sensing. We designed a three-electrode cyclic voltammetry test system and studied the performance of electrodes with different sizes and at different scan rates.