Ultrafast photoconductive switches integrated with electrical waveguides of low-k polyimide

We have fabricated ultrafast electrical waveguides with low-k polyimide integrated with ultrafast photoconductive switches formed by nano-anodization process for the first time. Electrical signals are affected by nonlinear capacitance of p-n junctions in this waveguides, and pass through the low-k polyimide, so the dielectric loss and the radiation loss are dramatically reduced. The electrical pulses as short as 290 fs were measured on this waveguide by an electro-optic sampling system based on a femtosecond laser.

[1]  Naoya Yoda,et al.  New Photosensitive High Temperature Polymers for Electronic Applications , 1984 .

[2]  Neville C. Luhmann,et al.  A monolithic nonlinear transmission line system for the experimental study of lattice solitons , 1995 .

[3]  A. Trasser,et al.  Efficient transient compression using an all-silicon nonlinear transmission line , 1998 .

[4]  Hiroshi Masuhara,et al.  Tip‐induced anodization of titanium surfaces by scanning tunneling microscopy: A humidity effect on nanolithography , 1993 .

[5]  Mark J. W. Rodwell,et al.  GaAs nonlinear transmission lines for picosecond pulse generation and millimeter-wave sampling , 1991 .

[6]  C. W. Gabel,et al.  Picosecond electro‐optic sampling system , 1982 .

[7]  T. Fukushima,et al.  New concept of positive photosensitive polyimide: Reaction development patterning (RDP) , 2001 .

[8]  S. Kubota,et al.  Positive Photoreactive Polyimides. II. Preparation and Characterization of Polyimide Precursors Containing α-(2-Nitrophenyl)ethyl Ester Side Chains , 1987 .

[9]  M. Hoshi,et al.  Application of STM Nanometer-Size Oxidation Process to Planar-Type MIM Diode , 1995 .

[10]  T. Fukushima,et al.  Synthesis and positive-imaging photosensitivity of soluble polyimides having pendant carboxyl groups , 2001 .

[11]  Calvin Domier,et al.  Novel concepts for improved nonlinear transmission line performance , 1995 .

[12]  M. Rodwell,et al.  Active and nonlinear wave propagation devices in ultrafast electronics and optoelectronics , 1994, Proc. IEEE.

[13]  M. Rodwell,et al.  DC - 725 GHz sampling circuits and subpicosecond nonlinear transmission lines using elevated coplanar waveguide , 1995, IEEE Microwave and Guided Wave Letters.

[14]  M. Ito,et al.  Low dark current GaAs metal-semiconductor-metal (MSM) photodiodes using WSi x contacts , 1986 .

[15]  R. Harrison,et al.  A fully distributed heterostructure-barrier varactor nonlinear transmission-line frequency multiplier and pulse sharpener , 1998 .

[16]  Taro Itatani,et al.  Positive photosensitive polyimide synthesized by block-copolymerization for KrF lithography , 2000, Advanced Lithography.

[17]  S. Kubota,et al.  Preparation of positive photoreactive polyimides and their characterization , 1987 .