论文信息 - Enhanced infrared responsivity of helium implanted SOI waveguides

Enhanced infrared responsivity of helium implanted SOI waveguides

We study the infrared photoresponse of silicon waveguides which were implanted with helium ions. The observed enhancement in responsivity at 1.55 mum wavelength was sufficient for use in in-line channel power monitoring applications

Y. Liu | C.W. Chow | H.K. Tsang | W.Y. Cheung

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