Highly response gas sensor based the Au-ZnO films processed by combining magnetron sputtering and Ar plasma treatment

The excellent and promising gas sensors not only have high response, but also can be easily integrated with other semiconductor devices to form an intelligent chip. In order to realize this goal, an effective strategy is proposed to combine the magnetron sputtering and Ar plasma treatment. As a result, a high-performance sensor based on Au-ZnO films is achieved at the optimal technology parameter, with high response (Ra/Rg) of 190 to 100 ppm isopropanol (IPA), rapid response/recovery speed of 1 s/18 s, and low detection limit of 100 ppb at 300 °C. Moreover, the mechanisms of the improvement on the sensing properties of the as-fabricated sensor are discussed. The present work provides new ideas for the future development of integrating gas sensors with functional circuits to form a smart chip that can perform data acquisition, processing and storage.

[1]  B. Zhu,et al.  Metal–organic framework-derived mesoporous rGO–ZnO composite nanofibers for enhanced isopropanol sensing properties , 2023, Sensors and Actuators B: Chemical.

[2]  M. Asghar,et al.  Effect of TiN-Based Nanostructured Coatings on the Biocompatibility of NiTi Non-ferrous Metallic Alloy by Cathodic Cage Plasma Processing , 2023, Journal of Inorganic and Organometallic Polymers and Materials.

[3]  Weiguang Yang,et al.  Preparation and electrical properties of Ni-doped InZnO thin film transistors , 2023, Materials Science in Semiconductor Processing.

[4]  Baoyu Huang,et al.  Layered Mxene Heterostructured with In2o3 Nanoparticles for Ammonia Sensors at Room Temperature , 2022, SSRN Electronic Journal.

[5]  G. Lu,et al.  Variable dimensional structure and interface design of In2O3/rGO nanocomposites with oxygen vacancy for enhancing NO2 sensing performance , 2022, Sensors and Actuators B: Chemical.

[6]  M. Debliquy,et al.  Investigation on isopropanol sensing properties of LnFeO3(Ln=Nd, Dy, Er) perovskite materials synthesized by microwave-assisted hydrothermal method , 2022, Applied Surface Science.

[7]  E. Llobet,et al.  Dysprosium Doped Zinc Oxide for NO2 Gas Sensing , 2022, Sensors.

[8]  Haiyang Gui,et al.  Moisture-Resistant Gas Sensor Derived from ZIF-8/Layered Double Hydroxide/Ti3C2Tx Nanocomposites for Trace Isopropanol Detection , 2022, ACS Applied Nano Materials.

[9]  Haohan Wang,et al.  Preparation of Au@ZnO Nanofilms by Combining Magnetron Sputtering and Post-Annealing for Selective Detection of Isopropanol , 2022, Chemosensors.

[10]  Hongliang Lu,et al.  Pt Nanoparticle-Modified SnO2–ZnO Core–Shell Nanosheets on Microelectromechanical Systems for Enhanced H2S Detection , 2022, ACS Applied Nano Materials.

[11]  D. Correa,et al.  A Review on Chemiresistive ZnO Gas Sensors , 2022, Sensors and Actuators Reports.

[12]  Fangzhou Du,et al.  Carbon monoxide detection down to ppb-level realized by O2 plasma treated TiO2-gated AlGaN/GaN HEMT sensor , 2022, Sensors and Actuators B: Chemical.

[13]  T. Iqbal,et al.  Novel corrosive behavior of titanium oxynitride film deposited on nickel–titanium alloy using cathodic cage plasma processing technique , 2021, Plasma Processes and Polymers.

[14]  Xi Yang,et al.  Improving anti-humidity property of In2O3 based NO2 sensor by fluorocarbon plasma treatment , 2021 .

[15]  Nannan Wu,et al.  NiO nanoparticles-decorated ZnO hierarchical structures for isopropanol gas sensing , 2021, Rare Metals.

[16]  Yanhui Sun,et al.  Acetone Sensing Mechanism of Ar/O2 Plasma Modified Indium Oxide Electrospun Fibers: A Combined DFT and Experimental Study , 2021, Journal of Alloys and Compounds.

[17]  Xianghong Liu,et al.  Plasma-induced oxygen vacancies enabled ultrathin ZnO films for highly sensitive detection of triethylamine. , 2021, Journal of hazardous materials.

[18]  A. Hakeem,et al.  Engineering the depletion layer of Au-modified ZnO/Ag core-shell films for high-performance acetone gas sensing , 2021, Sensors and Actuators B: Chemical.

[19]  Yu-Jun Zhao,et al.  Theoretical Study of Oxygen-Vacancy Distribution in In2O3 , 2021 .

[20]  Bo Liu,et al.  CuO nanoparticle loaded ZnO hierarchical heterostructure to boost H2S sensing with fast recovery , 2021, Sensors and Actuators B: Chemical.

[21]  P. Cao,et al.  Synthesis and characterization of ErFeO3 nanoparticles by a hydrothermal method for isopropanol sensing properties , 2021 .

[22]  Zhen Jin,et al.  Enhanced Isopropanol Sensing Performance of the CdS Nanoparticle Decorated ZnO Porous Nanosheets-Based Gas Sensors , 2021, IEEE Sensors Journal.

[23]  Shantang Liu,et al.  Synthesis of Pt-doped SnO2 flower-like hierarchical structure and its gas sensing properties to isopropanol , 2021, Journal of Materials Science.

[24]  Koji Toma,et al.  Ultra-Sensitive Isopropanol Biochemical Gas Sensor (Bio-Sniffer) for Monitoring of Human Volatiles , 2020, Sensors.

[25]  Yamei Zhang,et al.  Fast Response Isopropanol Sensing Properties with Sintered BiFeO3 Nanocrystals , 2020, Materials.

[26]  David-Wei Zhang,et al.  ZnO branched p-CuxO @n-ZnO heterojunction nanowires for improving acetone gas sensing performance , 2020 .

[27]  Danzhen Li,et al.  Regulating charge transfer over 3D Au/ZnO hybrid inverse opal toward efficiently photocatalytic degradation of bisphenol A and photoelectrochemical water splitting , 2020 .

[28]  Xianghong Liu,et al.  Oxygen Vacancies Enabled Porous SnO2 Thin Films for Highly Sensitive Detection of Triethylamine at Room Temperature. , 2020, ACS applied materials & interfaces.

[29]  A. Ly,et al.  A novel low-concentration isopropanol gas sensor based on Fe-doped ZnO nanoneedles and its gas sensing mechanism , 2020, Journal of Materials Science.

[30]  S. Akbar,et al.  Role of Oxygen Vacancies in Nanostructured Metal-Oxide Gas Sensors: A Review , 2019 .

[31]  H. Kwon,et al.  Low temperature NO2 sensing properties of RF-sputtered SnO-SnO2 heterojunction thin-film with p-type semiconducting behavior , 2018, Ceramics International.

[32]  M. Green,et al.  Diode laser annealing of epitaxy Ge on sapphire (0 0 0 1) grown by magnetron sputtering , 2017 .

[33]  M. Kimura,et al.  Room-temperature fabrication of a Ga-Sn-O thin-film transistor , 2017 .

[34]  Bingqiang Cao,et al.  Highly sensitive gold-decorated zinc oxide nanorods sensor for triethylamine working at near room temperature. , 2017, Journal of colloid and interface science.

[35]  M. R. Reddy,et al.  Enhancement of the isopropanol gas sensing performance of SnO2/ZnO core/shell nanocomposites , 2017 .

[36]  R. Maboudian,et al.  In Situ Localized Growth of Ordered Metal Oxide Hollow Sphere Array on Microheater Platform for Sensitive, Ultra-Fast Gas Sensing. , 2017, ACS applied materials & interfaces.

[37]  Jun Zhang,et al.  Near Room Temperature, Fast-Response, and Highly Sensitive Triethylamine Sensor Assembled with Au-Loaded ZnO/SnO₂ Core-Shell Nanorods on Flat Alumina Substrates. , 2015, ACS applied materials & interfaces.

[38]  Yan Wang,et al.  Isopropanol sensing properties of coral-like ZnO–CdO composites by flash preparation via self-sustained decomposition of metal–organic complexes , 2014 .

[39]  G. Lu,et al.  Hollow α-Fe2O3 quasi-cubic structures: Hydrothermal synthesis and gas sensing properties , 2014 .

[40]  Artur Rydosz,et al.  Amorphous and Nanocrystalline Magnetron Sputtered CuO Thin Films Deposited on Low Temperature Cofired Ceramics Substrates for Gas Sensor Applications , 2014, IEEE Sensors Journal.

[41]  Z. Yin,et al.  A carbon monoxide gas sensor using oxygen plasma modified carbon nanotubes , 2012, Nanotechnology.

[42]  Chunxiang Xu,et al.  Ultraviolet electroluminescence from n-ZnO/i-MgO/p+-GaN heterojunction light-emitting diodes fabricated by RF-magnetron sputtering , 2012 .

[43]  Haiqiang Lu,et al.  Highly sensitive and selective dimethylamine sensors based on hierarchical ZnO architectures composed of nanorods and nanosheet-assembled microspheres , 2012 .