Temperature and Flow Rate Control of Diffusing Chamber

The temperature and flow rate control of diffusing chamber is one of the key technologies in the production of poly-crystal silicon thin film. As there exist some modeling uncertainties and errors in the actual system, it is difficult to guarantee the chamber variable temperature conditions and the flow rate of diffusion gas being controlled within its targeted range in the rapid thermal processing (RTP). In this paper, the control applies the programmable logic controller (PLC) to configure control hardware system, proposes expert proportional integral derivative (PID) control method to regulate the gas flow rate and H∞ control strategy to attenuate chamber modeling uncertainties and disturbances, respectively, to steer the chamber rapid variable temperature very close to the expected product temperatures. Furthermore, it designs human-machine integrated user control interface (HMI) and achieves rapid and accurately control performances for user operating production. The designed control system are simulated and tested in the application, which demonstrates that the control method has strong robustness when the modeling uncertainties, errors, parameters perturbation and disturbances, the temperature and flow rate meet the requirements of precisely trajectory following.

[1]  Hyun Min Do,et al.  A learning approach of wafer temperature control in a rapid thermal processing system , 2001 .

[2]  Tianyou Chai,et al.  Intelligence-Based Temperature Switching Control for Cement Raw Meal Calcination Process , 2015, IEEE Transactions on Control Systems Technology.

[3]  Deng Hua Li,et al.  Temperature Drift Compensation Algorithm Based on BP and GA in Quartzes Flexible Accelerometer , 2012 .

[4]  Naoharu Yoshitani,et al.  Model-based control of strip temperature for the heating furnace in continuous annealing , 1998, IEEE Trans. Control. Syst. Technol..

[5]  J. Bordeneuve,et al.  Temperature control in a rapid thermal processor , 1992 .

[6]  Stephen A. Norman,et al.  Optimization of Wafer Temperature Uniformity in Rapid Thermal Processing Systems , 1991 .

[7]  Béla G. Lipták,et al.  Instrument engineers' handbook , 2012 .

[8]  Oliver Iliev,et al.  A fuzzy logic-based controller for integrated control of protected cultivation , 2014 .

[9]  R. S. Gyurcsik,et al.  A model for rapid thermal processing: achieving uniformity through lamp control , 1991 .

[10]  editor-in-chief Bela G. Liptak.  Instrument Engineers' Handbook Process Control , 2010 .

[11]  Hong-Bo Yang,et al.  Temperature characteristics and error compensation for quartz flexible accelerometer , 2015, Int. J. Autom. Comput..

[12]  Antonio Visioli,et al.  Practical PID Control , 2006 .

[13]  J.P. Krusius,et al.  Rapid thermal processing of thin gate dielectrics. Oxidation of silicon , 1985, IEEE Electron Device Letters.

[14]  R. S. Gyurcsik,et al.  Thermal uniformity and stress minimization during rapid thermal processes , 1995 .

[15]  In-Beum Lee,et al.  Process Identification and PID Control , 2009 .

[16]  Hisham Z. Massoud,et al.  Manufacturability of rapid-thermal oxidation of silicon: oxide thickness, oxide thickness variation, and system dependency , 1992 .

[17]  Krishna C. Saraswat,et al.  Rapid thermal processing uniformity using multivariable control of a circularly symmetric 3 zone lamp , 1992 .

[18]  Hai-ping Hu.  Influences of Interfacial Shear in Turbulent Film Boiling on a Horizontal Tube with External Flowing Liquid , 2015 .

[19]  Chin-Teng Lin,et al.  Application of neural fuzzy network to pyrometer correction and temperature control in rapid thermal processing , 1999, IEEE Trans. Fuzzy Syst..

[20]  Kam W. Ng.  Control valve noise , 1994 .

[21]  Jay H. Lee,et al.  Experimental application of a quadratic optimal iterative learning control method for control of wafer temperature uniformity in rapid thermal processing , 2003 .

[22]  Yuanqing Xia,et al.  Applied Control Systems Design , 2012 .

[23]  Anke Xue,et al.  Temperature Control of Industrial Coke Furnace Using Novel State Space Model Predictive Control , 2014, IEEE Transactions on Industrial Informatics.

[24]  Weihua Gui,et al.  Temperature Uniformity Control of Large-Scale Vertical Quench Furnaces for Aluminum Alloy Thermal Treatment , 2016, IEEE Transactions on Control Systems Technology.

[25]  E. Yaz.  Linear Matrix Inequalities In System And Control Theory , 1998, Proceedings of the IEEE.