A Hybrid Pneumatic and Piezoelectric 3d Micro Scanner for Cancer Imaging

This paper presents the development of a new MEMS confocal scanner based on pneumatic and piezoelectric actuators. Confocal imaging was carried out by actuating an objective lens in out-of-plane direction (Z-axis) and lateral directions (X- and Y-axes) using a pneumatic actuator and two piezoelectric actuators, respectively. The novelty is in using hybrid pneumatic and piezoelectric actuators for confocal scanning applications. We demonstrated 3D scanning with a 785 nm laser, and the new confocal system could assist clinicians to accurately identify lesions in the future.

[1]  Haishan Zeng,et al.  Real-time thickness measurement of biological tissues using a microfabricated magnetically-driven lens actuator , 2011, Biomedical microdevices.

[2]  George M. Whitesides,et al.  A soft, bistable valve for autonomous control of soft actuators , 2018, Science Robotics.

[3]  Ina Pavlova,et al.  Compact and flexible raster scanning multiphoton endoscope capable of imaging unstained tissue , 2011, Proceedings of the National Academy of Sciences.

[4]  S. Konishi,et al.  Thin flexible end-effector using pneumatic balloon actuator , 2000 .

[5]  Satoshi Konishi,et al.  Merging micro and macro robotics toward micro manipulation for biomedical operation , 2005 .

[6]  K. Jeong,et al.  1.65 mm diameter forward-viewing confocal endomicroscopic catheter using a flip-chip bonded electrothermal MEMS fiber scanner. , 2018, Optics express.

[7]  Haishan Zeng,et al.  Real-time vertical/horizontal section imaging and 3D image construction using a 3-axis electromagnetic confocal microscanner , 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[8]  S. Konishi,et al.  All PDMS pneumatic microfinger with bidirectional motion and its application , 2006, Journal of Microelectromechanical Systems.

[9]  Benjamin Gorissen,et al.  Theoretical and experimental analysis of pneumatic balloon microactuators , 2011 .

[10]  Haishan Zeng,et al.  A Handheld Electromagnetically Actuated Fiber Optic Raster Scanner for Reflectance Confocal Imaging of Biological Tissues , 2013, IEEE Transactions on Biomedical Engineering.

[11]  Haishan Zeng,et al.  Vertical optical sectioning using a magnetically driven confocal microscanner aimed for in vivo clinical imaging. , 2011, Optics express.

[12]  Haijun Li,et al.  Integrated monolithic 3D MEMS scanner for switchable real time vertical/horizontal cross-sectional imaging. , 2016, Optics express.