论文信息 - SMI: a new method to allow low cost, high resolution micro-machining using UV solid state lasers

SMI: a new method to allow low cost, high resolution micro-machining using UV solid state lasers

A new solid state laser based mask projection technique for micro-structuring materials is introduced and results obtained with a pilot system are shown. Details of the proposed architecture of production tools using the new technology are given. Advantages of the new method over conventional excimer laser based mask projection systems are summarized.

Phil T. Rumsby | David Charles Milne | David Thomas Edmund Myles

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