Measurement of mechanical properties of three-dimensional nanometric objects by an atomic force microscope incorporated in a scanning electron microscope

An atomic force microscope that mounts on a sample stage of a scanning force microscope (SEMAFM) was developed. It was implemented for measurement of static mechanical properties of three-dimensional nanometric objects. The sample stage of the AFM was equipped with piezoelectric actuators enabling raster scanning as well as three degrees of freedom positioning with sub nm resolution and mm movable range. This enabled centering the AFM tip to the field of view of the SEM. Measurement of the spring constant and rupture force of three-dimensional nanometric structures was made possible. The SEMAFM also functioned as a conventional AFM.

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