T-type XY Motion Control System Redundantly Driven for Semiconductor Packaging

A T-type XY motion control system redundantly actuated by multi-linear motors was presented,which can be used in semiconductor packaging.T-type motion control system consists of one linear motor used to drive Y axis,two linear motors used to drive X axis,stacked mechanism,high resolution and high precision position sensors and control system.The stacked mechanism conduces to small dimension,light load and high stiffness.The higher acceleration was achieved since the multi-linear motors can supply with more power.The controller was designed and demonstrated based on the experimental model come from sweep test.The experiment result shows that the T-type motion control system has the maximum acceleration capabilities in 9.25g,the maximum veloc- ity capabilities in 0.6m/s,positioning accuracy at the micron level,which meets the hight requirement of semiconductor packaging.