Post-annealing effect upon optical properties of electron beam evaporated molybdenum oxide thin films

Abstract Molybdenum oxide (MoO 3 ) thin films were deposited by electron beam evaporation. The chemical composition, microstructure, optical and electrical properties of MoO 3 thin films depend on the annealing temperature and ambient atmosphere. X-ray diffraction (XRD) shows that crystalline MoO 3 films can be obtained at various post-annealing temperatures from 200 to 500 °C in N 2 and O 2 . X-ray photoelectron spectroscopy (XPS) results reveal that the O-1s emission peak was shifted slightly toward lower binding energies as the annealing temperature in N 2 was increased. The oxygen vacancies and conductivity of MoO 3 film increased with the annealing temperature. However, when the MoO 3 films were annealed in an atmosphere of O 2 , the optical transmission, the O/Mo ratio and the photon energy increased with the annealing temperature. The results differ from those for films annealed in a N 2 atmosphere.

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