论文信息 - Demonstration of direct bonding between InP and gadolinium gallium garnet (Gd3Ga5O12) substrates

Demonstration of direct bonding between InP and gadolinium gallium garnet (Gd3Ga5O12) substrates

The authors demonstrate the direct bonding of InP/Gd3Ga5O12 (GGG) and InP/GaInSb on GGG without glue. After chemical treatment, heat treatment was applied in an H2 atmosphere without a weight. This technique makes feasible the integration of semiconductor and magneto-optic devices.

Tetsuya Mizumoto | Yoshiyuki Naito | Koichi Maru | Machiko Totoki

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