SAW sensors for harsh environments

Surface acoustic wave (SAW) sensors are rugged components made on highly stable substrate materials. In addi- tion, by their operating principle they lend themselves to wireless readout by radio signals. For these reasons, they are a first choice for sensing in harsh environments. A review is given on SAW device design, instrumentation of sensor systems, and on the physical interactions underlying sensing mechanisms. Recent progress in chemical as well as physical sensing toward various applications, e.g., in pollution control, biomedicine, and industry, is highlighted. Index Terms—Chemosensors, coatings, detection limit, high temperature, instrumentation, resolution, selectivity, sensing mechanisms, sensitivity, sensor materials, surface acoustic waves, torque.

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