论文信息 - Optical spectra of SixGe1−x alloys

Optical spectra of SixGe1−x alloys

We report pseudodielectric functions of SixGe1−x alloys at room temperature, measured ellipsometrically on polycrystalline samples and single‐crystal epitaxial layers, in the 1.7–5.6 eV range. Accurate values of the E1 threshold energies are obtained from numerically differentiated spectra. The measured dependence of E1 on x provides an efficient way to determine the alloy composition x. The spectral and compositional dependence of the optical constants forms a data base for optical studies of Si/SiGe layered structures.

[1] R. People,et al. Physics and applications of Ge x Si 1-x /Si strained-layer heterostructures , 1986 .

[2] Rajaram Bhat,et al. Optical properties of AlxGa1−x As , 1986 .

[3] A. A. Studna,et al. Dielectric functions and optical parameters of Si, Ge, GaP, GaAs, GaSb, InP, InAs, and InSb from 1.5 to 6.0 eV , 1983 .

[4] F. Lukes̆,et al. Determination of the Composition of GeSi Alloy by Ellipsometry , 1979, May 16.

[5] A. A. Studna,et al. High precision scanning ellipsometer. , 1975, Applied optics.

[6] David E. Aspnes,et al. Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers , 1974 .

[7] David E. Aspnes,et al. Third-derivative modulation spectroscopy with low-field electroreflectance , 1973 .

[8] K. Vedam,et al. Electroreflectance in GeSi alloys under hydrostatic pressure , 1971 .

[9] E. Schmidt. Optical Properties of GeSi Alloys in the Energy Region from 1 to 13 eV , 1968 .

[10] J. Tauc,et al. Optical investigation of the band structure of Ge-Si alloys , 1961 .

[11] A. R. Moore,et al. Intrinsic Optical Absorption in Germanium-Silicon Alloys , 1958 .