On the distribution of oxide defect levels in Al2O3 and HfO2 high-k dielectrics deposited on InGaAs metal-oxide-semiconductor devices studied by capacitance-voltage hysteresis
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A. Thean | N. Collaert | K. Meyer | J. Franco | S. Sioncke | A. Mocuta | D. Lin | A. Vais | V. Putcha