论文信息 - Sub-surface modifications in silicon with ultra-short pulsed lasers above 2 µm - 字舞流文

Sub-surface modifications in silicon with ultra-short pulsed lasers above 2 µm

V. Kalashnikov | A. Erbe | N. Tolstik | E. Sorokin | I. Sorokina | P. Ebbinghaus | I. Astrauskas | R. Richter | S. Rigaud | Paul Dalla Valle