论文信息 - Deposition of HfO2 on InAs by atomic-layer deposition - 字舞流文

Deposition of HfO2 on InAs by atomic-layer deposition

E. Vogel | A. Seabaugh | L. Wernersson | C. Thelander | D. Wheeler | A. Mikkelsen | A. Sonnet | L. Fröberg | K. Weststrate