Deposition of HfO2 on InAs by atomic-layer deposition
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E. Vogel | A. Seabaugh | L. Wernersson | C. Thelander | D. Wheeler | A. Mikkelsen | A. Sonnet | L. Fröberg | K. Weststrate
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E. Vogel | A. Seabaugh | L. Wernersson | C. Thelander | D. Wheeler | A. Mikkelsen | A. Sonnet | L. Fröberg | K. Weststrate