SEMICONDUCTOR DEVICES: Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl16

PANI/ZnPcCl16 (polyaniline doped with sulfosalicylic acid/hexadecachloro zinc phthalocyanine) powders were vacuum co-deposited onto Si substrates, where Pt interdigitated electrodes were made by micromachining. The PANI/ZnPcCl16 films were characterized and analyzed by SEM, and the influencing factors on its intrinsic performance were analyzed and sensitivities of the sensors were investigated by exposure to chlorine (Cl2) gas. The results showed that powders prepared with a stoichiometric ratio of (ZnPcCl16)0.6(PANI)0.4 had a preferential sensitivity to Cl2 gas, superior to those prepared otherwise; the optimal vacuum co-deposition conditions for the films are a substrate temperature of 160 °C, an evaporation temperature of 425 °C and a film thickness of 75 nm; elevating the operation temperature (above 100 °C) or increasing the gas concentration (over 100 ppm) would improve the response characteristics, but there should be upper levels for each. Finally, the gas sensing mechanism of PANI/ZnPcCl16 films was also discussed.

[1]  Saptarshi Majumder,et al.  Formation of nano-rod and nano-particles of polyaniline using Langmuir-Blodgett technique , 2008 .

[2]  Yuan Jie,et al.  Nitrogen Dioxide Sensing Properties and Mechanism of Copper Phthalocyanine Film , 2008 .

[3]  E. Faassen,et al.  Explanation of the low oxygen sensitivity of thin film phthalocyanine gas sensors , 2003 .

[4]  Anthony Krier,et al.  The influence of ammonia, chlorine and nitrogen dioxide on chloro-aluminium phthalocyanine thin films , 1997 .

[5]  Takeshi Miki,et al.  Dye-sensitization of n-TiO2 single-crystal electrodes with vapor-deposited oxometal phthalocyanines , 1999 .

[6]  A. Altındal,et al.  Synthesis, characterization, conduction and gas sensing properties of novel multinuclear metallo phthalocyanines (Zn, Co) with alkylthio substituents , 2006 .

[7]  Rose Amal,et al.  Photochemical synthesis of chlorine gas from iron(III) and chloride solution , 2006 .

[8]  Andrew P. Monkman,et al.  Polyaniline thin films for gas sensing , 1995 .

[9]  王立权,et al.  Synthesis of organic semiconductor hexadecachloro zinc phthalocyanine and its gas sensitivity , 2009 .

[10]  Y. P. Lee,et al.  Room-temperature gas sensing studies of polyaniline thin films deposited on different substrates , 2009 .

[11]  Subhas Chandra,et al.  Electronic applications of semiconducting polymers , 1994 .

[12]  Marc Debliquy,et al.  Influence of atmospheric pollutants on the conductance of phthalocyanine films , 1999 .

[13]  袁杰,et al.  Nitrogen Dioxide Sensing Properties and Mechanism of Copper Phthalocyanine Film , 2008 .

[14]  Pietro Siciliano,et al.  Spin-coated thin films of metal porphyrin-phthalocyanine blend for an optochemical sensor of alcohol vapours , 2004 .