论文信息 - Determination of thin film parameters from high accuracy measurements of spectral regular transmittance

Determination of thin film parameters from high accuracy measurements of spectral regular transmittance

The importance of reliable spectral transmittance measurements for reliable thin-film characterization is demonstrated. By using a model of the spectral transmittance of thin-film samples, the effect of various uncertainty components in transmittance measurements on the determined thin-film parameters is analysed. The experimental results for aluminium dioxide and tantalum pentoxide thin-film samples show good agreement with the model.

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