A review of silicon microphones

Silicon micromachining has successfully been applied to fabricate piezoelectric, piezoresistive and capactive microphones. The use of silicon has allowed the fabrication of microphones with integrated electronic circuitry and the development of the new FET microphone. The introduction of lithographic techniques has resulted in microphones with very small (1 mm2) diaphragms and with specially shaped backplates. The application of corrugated diaphragms seems a promising future development for silicon microphones. It is concluded from a noise consideration that the FET microphone shows a high noise level, which is mainly due to the small sensor capacitance. From this noise consideration, it can be shown that integration of a capacitive microphone and a preamplifier will result in a further reduction of the noise.

[1]  Piet Bergveld,et al.  General considerations of noise in microphone preamplifiers , 1990 .

[2]  H. Sandmaier,et al.  Stress free assembly technique for a silicon based pressure sensor , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[3]  W. Kuhnel,et al.  SILICON SUBMINIATURE MICROPHONES FOR AIRBORNE SOUND , 1991 .

[4]  R.M.E.J. Spiering,et al.  On-chip decoupling zone for package-stress reduction , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[5]  Wouter Olthuis,et al.  Improvement of the performance of microphones with a silicon nitride diaphragm and backplate , 1994 .

[6]  W. Kühnel,et al.  Micromachined subminiature condenser microphones in silicon , 1992 .

[7]  P. R. Scheeper,et al.  A silicon condenser microphone: Materials and technology , 1993 .

[8]  M. Royer,et al.  ZnO on Si integrated acoustic sensor , 1983 .

[9]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[10]  G. Wallis,et al.  Field Assisted Glass‐Metal Sealing , 1969 .

[11]  Preston V. Murphy,et al.  Miniature Electret Microphones , 1970 .

[12]  Gerhard M. Sessler,et al.  Silicon subminiature microphones with organic piezoelectric layers: fabrication and acoustical behaviour , 1991 .

[13]  Wouter Olthuis,et al.  Fabrication of silicon condenser microphones using single wafer technology , 1992 .

[14]  J. A. Voorthuyzen,et al.  Semiconductor-based electret sensors for sound and pressure , 1989 .

[15]  Wouter Olthuis,et al.  Fabrication of a subminiature silicon condenser microphone using the sacrificial layer technique , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[16]  A.G.H. van der Donk.  A silicon condenser microphone: modelling and electronic circuitry , 1992 .

[17]  F. Parodi,et al.  A silicon condenser microphone with a highly perforated backplate , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[18]  P. Murphy,et al.  Subminiature silicon integrated electret capacitor microphone , 1989 .

[19]  J. Bergqvist,et al.  A new condenser microphone in silicon , 1990 .

[20]  Kensall D. Wise,et al.  Performance of non-planar silicon diaphragms under large deflections , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[21]  K. Suzuki,et al.  A silicon electrostatic ultrasonic transducer , 1989, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[22]  A. J. Sprenkels,et al.  Development of an electret microphone in silicon , 1989 .

[23]  W.H. Ko,et al.  A high-sensitivity integrated-circuit capacitive pressure transducer , 1982, IEEE Transactions on Electron Devices.

[24]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[25]  K. Wise,et al.  Performance of nonplanar silicon diaphragms under large deflections , 1994 .

[26]  Richard S. Muller,et al.  Improved IC-compatible piezoelectric microphone and CMOS process , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[27]  Wouter Olthuis,et al.  Amplitude-modulated electro-mechanical feedback system for silicon condenser microphones , 1992 .

[28]  P Bergveld,et al.  Optimal design of an electret microphone metal-oxide-semiconductor field-effect transistor preamplifier. , 1992, The Journal of the Acoustical Society of America.

[29]  Gisela Hess,et al.  A subminiature condenser microphone with silicon nitride membrane and silicon back plate , 1989 .

[30]  R. Schellin,et al.  A silicon subminiature microphone based on piezoresistive polysilicon strain gauges , 1992 .

[31]  J. E. Warren.  Capacitance microphone static membrane deflections: Comments and further results , 1973 .

[32]  E. Graf,et al.  Silicon membrane condenser microphone with integrated field-effect transistor , 1993 .

[33]  Reimund Gerhard-Multhaupt,et al.  Silicon‐dioxide electret transducer , 1984 .

[34]  J. Bernstein.  A micromachined condenser hydrophone , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

[35]  Miko Elwenspoek,et al.  On-chip decoupling zone for package-stress reduction , 1991 .

[36]  W. Kühnel,et al.  Silicon condenser microphone with integrated field-effect transistor , 1991 .

[37]  Piet Bergveld,et al.  Optimization of Capactive Microphone and Pressure Sensor Performance by Capacitor-electrode Shaping , 1991 .

[38]  T. Bourouina,et al.  A new condenser microphone with a p+ silicon membrane , 1992 .

[39]  W. Kühnel,et al.  A silicon condenser microphone with structured back plate and silicon nitride membrane , 1992 .

[40]  Wouter Olthuis,et al.  The design, fabrication, and testing of corrugated silicon nitride diaphragms , 1994 .