Analysis of a double-phase regulation and an ultra wideband tunable micro electromechanical system resonator

To deal with the problems of narrow band and fixed resonant frequency of traditional MEMS (Micro electromechanical system) resonator caused by single load and vertical deformation, this paper proposes a novel MEMS resonator featured with ultra wideband, tunable frequency and two stage regulations based on vertical and horizontal load. The differential equations of vertical and horizontal load, double stages regulation resonator are built, and the frequency equations of the resonator, the two ends of which is anchored, are deduced. The center frequency of the proposed resonator is 17.7 MHz, and the two stages range are 395480 ppm and 16 ppm, respectively.

[1]  H. Joshi,et al.  Substrate Integrated Evanescent-Mode Cavity Filter With a 3.5 to 1 Tuning Ratio , 2010, IEEE Microwave and Wireless Components Letters.

[2]  F. Ayazi,et al.  Electrostatically tunable piezoelectric-on- silicon micromechanical resonator for real-time clock , 2012, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[3]  W.J. Chappell,et al.  High-$Q$ Fully Reconfigurable Tunable Bandpass Filters , 2009, IEEE Transactions on Microwave Theory and Techniques.

[4]  A.B.M. Jansman,et al.  4D-3 A 2 GHz Reference Oscillator incorporating a Temperature Compensated BAW Resonator , 2006, 2006 IEEE Ultrasonics Symposium.

[5]  W. Tang,et al.  High frequency filters based on piezoelectrically transduced micromechanical resonators , 2004, IEEE Ultrasonics Symposium, 2004.

[6]  E. Schmidhammer,et al.  3.8 /spl times/ 3.8 mm/sup 2/ PCS-CDMA duplexer incorporating thin film resonator technology , 2004, IEEE Ultrasonics Symposium, 2004.

[7]  Weileun Fang,et al.  High-$Q$ Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning , 2012, Journal of Microelectromechanical Systems.

[8]  H. Joshi,et al.  High Q narrow-band tunable filters with controllable bandwidth , 2009, 2009 IEEE MTT-S International Microwave Symposium Digest.

[9]  H. Joshi,et al.  Highly Loaded Evanescent Cavities for Widely Tunable High-Q Filters , 2007, 2007 IEEE/MTT-S International Microwave Symposium.

[10]  A. H. M. Zahirul Alam,et al.  Design of a pierce oscillator for CMOS SAW resonator , 2012, 2012 International Conference on Computer and Communication Engineering (ICCCE).

[11]  Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators , 2010 .

[12]  D. Peroulis,et al.  A Tunable Miniaturized RF MEMS Resonator With Simultaneous High $Q$ (500–735) and Fast Response Speed $(<\hbox{10}-\hbox{60}\ \mu\hbox{s})$ , 2013, Journal of Microelectromechanical Systems.