Stress-impedance effects in multilayered FeSiB/Cu/FeSiB films

Abstract Multilayered FeSiB/Cu/FeSiB films with a meander structure were fabricated by magnetron sputtering on thin glass substrate, and the stress-impedance (SI) effects in the multilayered FeSiB/Cu/FeSiB films were studied in the frequency range of 1–40 MHz for different film thicknesses of FeSiB film and Cu layer. Experimental results showed that the values of SI ratio increased with the deflection of the layered FeSiB/Cu/FeSiB films at high frequencies, and a large negative SI ratio of − 17.3% for a frequency of 5 MHz at the deflection of 1 mm was obtained in the multilayered FeSiB/Cu/FeSiB films with a thicker FeSiB film, which was very attractive for the applications of stress sensors.

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