论文信息 - Effects of thermal treatment on the optical constants of GeTe, Sb2Te3, Ge2Sb2Te5 systems

Effects of thermal treatment on the optical constants of GeTe, Sb2Te3, Ge2Sb2Te5 systems

The effects of thermal treatment on the dependence of optical constants on wavelength and the changes of optical constants of GeTe, Sb2Te3 and Ge2Sb2Te5 thin films at different annealing temperatures are studied. It can be found that the optical constants of GeTe, Sb2Te3 and Ge2Sb2Te5 thin films change with increasing annealing temperature. The crystallization speed changes with increasing Sb content, i.e.: the crystallization speed of GeTe < the crystallization speed of Ge2Sb2Te5 < the crystallization speed of Sb2Te3. The mechanism of the change of the optical constants of the GeTe, Sb2Te3 and Ge2Sb2Te5 systems due to thermal treatment is also analyzed.

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