Contact resistance of flexible, transparent carbon nanotube films with metals

We studied the contact properties of different metals to optically-transparent single-walled carbon nanotube (SWCNT) films using fabrication processes compatible with flexible electronic applications. The SWCNT films are deposited on flexible polyethylene terephthalate substrate and patterned in test structures optimized for contact resistance measurements for a particular metal contact. Specific contact resistance and current transfer length is determined for Pt, Cr, Cu, and Au contacts. We also evaluate effects of chemical doping and thickness of SWCNT films on the contact resistance. We find that the current transfer length, defining the minimal dimensions of efficient contacts to transparent SWCNT films, ranges from 8×10−6 to 10−4 m for different metals.

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