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In this study, we analyzed flow characteristics of micro-nozzles for basic research to develop micro propulsion system. Cold gas propulsion system was used, and micro-nozzles having nozzle throat diameters of 1.0, 0.5, 0.25 mm were fabricated with EDM method. Thrust was measured through the use of plate-spring and strain gage based thrust measurement system, and flow characteristics of micro-nozzles were analyzed under ambient condition and vacuum condition. We used argon and nitrogen gases as propellant, and compared experimental results with CFD analysis. From the result, we verified the flow losses of viscosity and back-pressure caused by minimization of nozzle.