Self-separation method and device for spatial error of superprecise revolution reference

The present invention belongs to the field of precise instrument manufacture and measurement technology, and is especially self-separation method and device for spatial error of super-precise revolution reference. The method of Z-direction section-by-section separation of super-precise revolution reference spatial motion error can meet the requirement of high precision cylindricity instrument to reduce spatial revolution error. The self-separation device for spatial error of super-precise revolution reference is developed by means of integrating roundness error separating system and cylindricity instrument revolution main shaft system. The bench revolving single-transposition small-angle error separation method is adopted in realizing the section-by-section separation of spatial revolution motion error of cylindricity instrument revolution main shaft, so as to reach the aim of reducing the effect of the spatial revolution motion error on measurement result.