论文信息 - Structural change of direct silicon bonding substrates by interfacial oxide out-diffusion annealing - 字舞流文

Structural change of direct silicon bonding substrates by interfacial oxide out-diffusion annealing

J. Kikkawa | O. Sakata | Y. Imai | S. Kimura | O. Nakatsuka | K. Izunome | A. Sakai | S. Zaima | E. Toyoda | Tetsuji Kato | Y. Nakamura