Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
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Urs Staufer | Peter Vettiger | Jürgen Brugger | Terunobu Akiyama | Nico F. de Rooij | A. Tonin | P. Vettiger | J. Brugger | T. Akiyama | U. Staufer | A. Tonin | H. Hidber | Hans-Rudolf Hidber | N. Rooij
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