Strain mapping inside an individual processed vertical nanowire transistor using scanning X-ray nanodiffraction.
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J. Svensson | L. Wernersson | A. Björling | S. Kalbfleisch | F. Lenrick | J. Wallentin | R. Timm | A. Mikkelsen | Z. Ren | A. Krishnaraja | Zhongyunshen Zhu | D. Dzhigaev | Z. Balogh | Yi Liu | S. Hammarberg