Micromachined flow sensors—a review

Abstract Micromachining technology has been developed very rapidly in recent years. This technology takes advantage of the benefits of semiconductor technology to address the manufacturing and performance requirements of the sensors industry. The compatibility of micromachining and microelectronics makes the integration of electronics and mechanical elements possible. This covers the need of low-cost, accurate and reliable sensors for industrial and consumer product applications. An important product of micromachining technology is the micro-mass flow sensor which has a history of over 20 yrs. This paper presents a review of the research and development of micromachined flow sensors which have been done in the last few years by international academic and industrial institutions.

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