论文信息 - A Moiré method for high accuracy alignment in nanoimprint lithography - 字舞流文

A Moiré method for high accuracy alignment in nanoimprint lithography

Ernst-Bernhard Kley | Thomas Glinsner | Kurt Hingerl | Michael Mühlberger | Iris Bergmair | Rainer Schöftner | Marko Vogler | E. Kley | T. Glinsner | K. Hingerl | W. Schwinger | M. Vogler | I. Bergmair | H. Schmidt | M. Mühlberger | Wolfgang Schwinger | Holger Schmidt | M. Gmainer | Ch. Hasenfuí | R. Schöftner | M. Gmainer | Ch. Hasenfuí

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