Nano switching crossbar array ESD protection structures

We report a new nano-switching ESD protection mechanism and dual-polarity Cu/SixOyNz/W nano crossbar array ESD structures. Experiments show full ESD protection featuring fast response of 100pS, ultra low leakage of <;2pA and ESD protection of >9A. New dispersed local ESD tunneling model and CMOS integration are reported.

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