论文信息 - Charge transfer efficiency improvement of 4T pixel for high speed CMOS image sensor

Charge transfer efficiency improvement of 4T pixel for high speed CMOS image sensor

The charge transfer efficiency improvement method is proposed by optimizing the electrical potential distribution along the transfer path from the PPD to the FD. In this work, we present a non-uniform doped transfer transistor channel, with the adjustments to the overlap length between the CPIA layer and the transfer gate, and the overlap length between the SEN layer and transfer gate. Theory analysis and TCAD simulation results show that the density of the residual charge reduces from 1e11 /cm3 to 1e9 /cm3, and the transfer time reduces from 500 ns to 143 ns, and the charge transfer efficiency is about 77 e-/ns. This optimizing design effectively improves the charge transfer efficiency of 4T pixel and the performance of 4T high speed CMOS image sensor.

Xiangliang Jin | Jia Yang | Hongjiao Yang | Lizhen Tang | Weihui Liu

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