Rapid Simulation of Electrostatically Piston Actuated Segment Micromirror

Static and dynamic simulations of a typical electrostatically piston actuated micromirror fabricated by SUMMIT foundry are performed rapidly with the application of a set of analytical expressions to avoid heavy finite element analysis. Though the aperture function of the deflected micromirror array can not be described by analytical expression,but fast Fourier transfrom is easily performed using MATLAB to get the farfield diffraction pattern of monochromatic plane wave reflected off the micromirror array.