Analysis of performance/variability trade-off in Macaroni-type 3-D NAND memory

Full channel and Macaroni-type 3-D SONOS memories are thoroughly compared. Macaroni channel provides easier device controllability, resulting in tighter distributions of all electrical characteristics, at the expense of lower channel conduction. Next to this clear trade-off, memory window is also degraded. Improving channel material quality is the way to alleviate the trade-off, as demonstrated by Laser Thermal Anneal treatment of Macaroni channel.