Laser precision engineering: from microfabrication to nanoprocessing
暂无分享,去创建一个
Minghui Hong | Luping P. Shi | T. Chong | M. Hong | T. Chong | Tow C. Chong | L. Shi
[1] D. J. Lockwood,et al. Spin-wave quantization in ferromagnetic nickel nanowires. , 2002, Physical review letters.
[2] R. V. Duyne,et al. Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces , 1995 .
[3] Euan McLeod,et al. Subwavelength direct-write nanopatterning using optically trapped microspheres. , 2008, Nature nanotechnology.
[4] Dominique Barchiesi,et al. Optical characterization of nanosources used in scanning near-field optical microscopy , 1995 .
[5] Yongfeng Lu,et al. Laser-Scanning Probe Microscope Based Nanoprocessing of Electronics Materials , 2001 .
[6] C. Mirkin,et al. Applications of dip-pen nanolithography. , 2007, Nature nanotechnology.
[8] Hong‐Bo Sun,et al. Multiple-spot parallel processing for laser micronanofabrication , 2005 .
[9] H. J. Lee,et al. Deep subwavelength nanolithography using localized surface plasmon modes on planar silver mask , 2005 .
[10] T. Chong,et al. Pulsed laser ablation in a cooled liquid environment , 2008 .
[11] Fernando Castaño,et al. Magnetic behavior of lithographically patterned particle arrays (invited) , 2002 .
[12] Mordechai Rothschild,et al. 22-nm immersion interference lithography. , 2006, Optics express.
[13] Liang Li,et al. A combined top-down and bottom-up approach for precise placement of metal nanoparticles on silicon. , 2008, Small.
[14] P. Stark,et al. Breaking the diffraction barrier outside of the optical near-field with bright, collimated light from nanometric apertures , 2007, Proceedings of the National Academy of Sciences.
[15] Cunningham,et al. Using light as a lens for submicron, neutral-atom lithography. , 1992, Physical review letters.
[16] P. Leiderer,et al. Optical field enhancement effects in laser-assisted particle removal , 2001 .
[17] Chunlei Du,et al. Localized surface plasmon nanolithography with ultrahigh resolution. , 2007, Optics express.
[18] Charles M. Lieber,et al. Nanoelectronics from the bottom up. , 2007, Nature materials.
[19] T. Ebbesen,et al. Light in tiny holes , 2007, Nature.
[20] P. Holloway,et al. Laser‐target interactions during pulsed laser deposition of superconducting thin films , 1991 .
[21] Jabez J. McClelland,et al. MINIMIZING FEATURE WIDTH IN ATOM OPTICALLY FABRICATED CHROMIUM NANOSTRUCTURES , 1999 .
[22] Shinya Abe,et al. TeOx-based film for heat-mode inorganic photoresist mastering , 2005 .
[23] Tow Chong Chong,et al. Fabrication of nanostructures with laser interference lithography , 2008 .
[24] Jorge Morgado,et al. Near-field optical lithography of a conjugated polymer , 2003 .
[25] Z. B. Wang,et al. Parallel nanostructuring of GeSbTe film with particle mask , 2004 .
[26] T. Chong,et al. Angle effect in laser nanopatterning with particle-mask , 2004 .
[27] T. Chong,et al. Pulsed laser-assisted surface structuring with optical near-field enhanced effects , 2002 .
[28] Caroline A. Ross,et al. Properties of large-area nanomagnet arrays with 100 nm period made by interferometric lithography , 1999 .
[29] E. Abbe. Beiträge zur Theorie des Mikroskops und der mikroskopischen Wahrnehmung , 1873 .
[30] R. Scholten,et al. Progress towards atom lithography on iron , 2003 .
[31] K. Komvopoulos,et al. Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy , 2003 .
[32] B N Chichkov,et al. Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics. , 2003, Optics letters.
[33] Y. Shani,et al. Near‐field optical photomask repair with a femtosecond laser , 1999, Journal of microscopy.
[34] J J McClelland,et al. Laser-Focused Atomic Deposition , 1993, Science.
[35] Klaus Piglmayer,et al. Laser-induced surface patterning by means of microspheres , 2002 .
[36] N. Arnold,et al. Three-dimensional effects in dry laser cleaning , 2003 .
[37] H. Ming,et al. Beam manipulating by metallic nano-optic lens containing nonlinear media. , 2007, Optics express.
[38] T. Chong,et al. Laser assisted surface nanopatterning , 2003 .
[39] J. Heitz,et al. Perspectives of laser processing and chemistry , 2003 .
[40] L. Zhang,et al. Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation , 2000 .
[41] Henry I. Smith,et al. Synthesis of silicon nanowires and nanofin arrays using interference lithography and catalytic etching. , 2008, Nano letters.
[42] P. J. Bedrossian,et al. Magnetic force microscopy of single-domain cobalt dots patterned using interference lithography , 1996 .
[43] M. Hong,et al. Surface nanostructuring by femtosecond laser irradiation through near-field scanning optical microscopy , 2007 .
[44] Q. Xie,et al. Laser Singulation of Thin Wafers & Difficult Processed Substrates: A Niche Area over Saw Dicing , 2006 .
[45] Nanophase change for data storage applications. , 2007, Journal of nanoscience and nanotechnology.
[46] H. Herzig. Micro-Optics : Elements, Systems And Applications , 1997 .
[47] Theodore M. Bloomstein,et al. Patterning of sub-50 nm dense features with space-invariant 157 nm interference lithography , 2000 .
[48] T. Chong,et al. Laser Precision Engineering of Glass Substrates , 2004 .
[49] G. Somorjai,et al. Fabrication of Size-Tunable Large-Area Periodic Silicon Nanopillar Arrays with Sub-10-nm Resolution , 2003 .
[50] Tow Chong Chong,et al. Direct and subdiffraction-limit laser nanofabrication in silicon , 2003 .
[51] M. Hong,et al. Laser ablation of solid substrates in water and ambient air , 2001 .
[52] Wing P. Leung,et al. Noncontact monitoring of laser ablation using a miniature piezoelectric probe to detect photoacoustic pulses in air , 1992 .
[53] Andrea Notargiacomo,et al. Nanofabrication by scanning probe microscope lithography: A review , 2005 .
[54] Boris N. Chichkov,et al. Direct-write subwavelength structuring with femtosecond laser pulses , 2005 .
[55] T. Chong,et al. Pulsed-laser assisted nanopatterning of metallic layers combined with atomic force microscopy , 2002 .
[56] Mark L. Brongersma,et al. Plasmonics: the next chip-scale technology , 2006 .
[57] Katsuhisa Aratani,et al. High-Resolution Blue-Laser Mastering Using an Inorganic Photoresist. , 2003 .
[58] Xianfan Xu,et al. Enhanced optical near field from a bowtie aperture , 2006 .
[59] A. Kumar,et al. Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning , 2006 .
[60] Nicholas Murphy-DuBay,et al. Nanopatterning using NSOM probes integrated with high transmission nanoscale bowtie aperture. , 2008, Optics express.
[61] Eric Audouard,et al. Comparison of heat-affected zones due to nanosecond and femtosecond laser pulses using transmission electronic microscopy , 2002 .
[62] Henry I. Smith,et al. Low cost nanolithography with nanoaccuracy , 2001 .
[63] Richard Martel,et al. Simple fabrication scheme for sub-10 nm electrode gaps using electron-beam lithography , 2002 .
[64] Boris N. Chichkov,et al. Far-field and near-field material processing with. femtosecond laser pulses , 1999 .
[65] K. Komvopoulos,et al. Surface nanostructuring by nano-/femtosecond laser-assisted scanning force microscopy , 2005 .
[66] L S Tan,et al. Bimetallic structure fabricated by laser interference lithography for tuning surface plasmon resonance. , 2008, Optics express.
[67] Gregor Langer,et al. Femtosecond laser fabrication of apertures on two-dimensional microlens arrays , 2006 .
[68] Behringer,et al. High-contrast, high-resolution focusing of neutral atoms using light forces. , 1996, Physical review. A, Atomic, molecular, and optical physics.
[69] Zengbo Wang,et al. Near-field laser parallel nanofabrication of arbitrary-shaped patterns , 2007 .
[70] P. Willmott,et al. Pulsed laser vaporization and deposition , 2000 .
[71] Satoshi Kawata,et al. Apertureless optical near-field fabrication using an atomic force microscope on photoresists , 2002 .
[72] Tzu-Hung Chuang,et al. Extraordinary transmission through a silver film perforated with cross shaped hole arrays in a square lattice , 2007 .
[73] R. Anderson. Close-up imaging of documents and displays with lens arrays. , 1979, Applied optics.
[74] T. S. Ong,et al. Carbon nanoparticles based nonlinear optical liquid , 2004 .
[75] M. F. Chen,et al. An efficient method to improve the proximity effect for electron beam optical disc mastering , 2005 .
[76] Minoru Obara,et al. Nanostructuring of silicon surface by femtosecond laser pulse mediated with enhanced near-field of gold nanoparticles , 2006 .
[77] Koji Sugioka,et al. Advanced materials processing based on interaction of laser beam and a medium , 2003 .
[78] Zhaoning Yu,et al. Circuit fabrication at 17 nm half-pitch by nanoimprint lithography. , 2006, Nano letters.
[79] Harukazu Miyamoto,et al. Nanosize fabrication using etching of phase-change recording films , 2004 .
[80] Tow Chong Chong,et al. Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser , 2005 .
[81] G. Dearden,et al. Optical near-field distribution in an asymmetrically illuminated tip–sample system for laser/STM nanopatterning , 2007 .
[82] A. Hawryluk,et al. Fabrication of sub‐0.5 μm diameter cobalt dots on silicon substrates and photoresist pedestals on 50 cm×50 cm glass substrates using laser interference lithograph , 1996 .
[83] A. Requicha,et al. Plasmonics—A Route to Nanoscale Optical Devices , 2001 .
[84] S. A. Lee,et al. Light force cooling, focusing, and nanometer-scale deposition of aluminum atoms. , 1995, Optics letters.
[85] M. Hong,et al. Laser nano-fabrication of large-area plasmonic structures and surface plasmon resonance tuning by thermal effect , 2008 .
[86] Sreemanth M. V. Uppuluri,et al. Nanolithography using high transmission nanoscale bowtie apertures. , 2006, Nano letters.
[87] Zengbo Wang,et al. Ultrafast-laser-induced parallel phase-change nanolithography , 2006 .
[88] S. Urabe,et al. Atom lithography with ytterbium beam , 2003 .
[89] M. Kryder,et al. Near‐field magneto‐optics and high density data storage , 1992 .
[90] Mark L. Schattenburg,et al. Optically matched trilevel resist process for nanostructure fabrication , 1995 .
[91] Borja Sepúlveda,et al. Optical antennas based on coupled nanoholes in thin metal films , 2007 .
[92] T. Wágner,et al. Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions , 2006 .
[93] M. Hong,et al. Laser Nano-Patterning for Large Area Nanostructure Fabrication , 2008 .
[94] Satoshi Kawata,et al. Finer features for functional microdevices , 2001, Nature.
[95] Yongfeng Lu,et al. Mechanisms of photoluminescence from silicon nanocrystals formed by pulsed-laser deposition in argon and oxygen ambient , 2003 .
[96] T. Chong,et al. Models for laser ablation of polymers. , 2003, Chemical reviews.